Trimos TR Scan Premium Pack 3D
The Trimos TR Scan Premium Pack 3D is a high-precision, non-contact surface texture measurement system with nanometrical resolution. Using chromatic confocal line sensor technology, it captures 3D surface profiles in microseconds, suitable for sensitive surfaces. Ideal for R&D & quality control, especially in semiconductors, optics, and medical device manufacturing.
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Trimos TR Scan Premium Pack 3D
TR Scan Premium revolutionizes surface metrology by combining exceptional speed and non-contact measurement with nanometer resolution. With multiple optical heads, configurable optics, and powerful software tools, it excels measuring roughness, coatings, transparent materials, and tiny features. This Swiss-manufactured system surpasses contact-based limits.
Features
Overview
| Specification | CCM-L1 0.2 mm model | CCM-L1 1 mm model | CCM-L1 4 mm model |
|---|---|---|---|
| Vertical measurement range | 200 µm | 0.95 mm | 3.9 mm |
| Line width | 0.96 mm ± 0.01 mm | 1.91 mm ± 0.01 mm | 4.78 mm ± 0.02 mm |
| Lateral spacing | 5 µm | 10 µm | 25 µm |
| Working distance | 5.3 mm ± 0.2 mm | 18.5 mm ± 0.2 mm | 41 mm ± 0.2 mm |
| Spot size | 2 µm | 4 µm | 10 µm |
| Lateral resolution | 1 µm | 2 µm | 5 µm |
| Accuracy | ± 80 nm | ± 300 nm | ± 1.2 µm |
| Digital opening | 0.7 | 0.55 | 0.33 |
| Maximum measurement angle | 90° ± 44° | 90° ± 33° | 90° ± 20° |
| Thickness measurement range | 20-280 µm | 75 µm-1.35 mm | 300 µm-5.5 mm |
| Minimum Ra measurement | < 0.1 µm | < 0.8 µm | Not applicable |
